Structural and interfacial studies of atomic layer deposited high-k materials on silicon.
Ramarajesh. Katamreddy
10027/13034
https://indigo.uic.edu/articles/thesis/Structural_and_interfacial_studies_of_atomic_layer_deposited_high-k_materials_on_silicon_/10830980
Structural and interfacial studies of atomic layer deposited high-k materials on silicon.
2014-03-18 00:00:00
Engineering, Chemical.