Structural and interfacial studies of atomic layer deposited high-k materials on silicon. Ramarajesh. Katamreddy 10027/13034 https://indigo.uic.edu/articles/thesis/Structural_and_interfacial_studies_of_atomic_layer_deposited_high-k_materials_on_silicon_/10830980 Structural and interfacial studies of atomic layer deposited high-k materials on silicon. 2014-03-18 00:00:00 Engineering, Chemical.