%0 Thesis %A Katamreddy, Ramarajesh. %D 2014 %T Structural and interfacial studies of atomic layer deposited high-k materials on silicon. %U https://indigo.uic.edu/articles/thesis/Structural_and_interfacial_studies_of_atomic_layer_deposited_high-k_materials_on_silicon_/10830980 %K Engineering, Chemical. %X Structural and interfacial studies of atomic layer deposited high-k materials on silicon. %I University of Illinois at Chicago