10027/16960 Yu-Cheng. Lin Yu-Cheng. Lin Microfabricated miniature valves and pumps with a polyimide diaphragm. University of Illinois at Chicago 2014 Engineering, Electronics and Electrical. 2014-03-18 00:00:00 Thesis https://indigo.uic.edu/articles/thesis/Microfabricated_miniature_valves_and_pumps_with_a_polyimide_diaphragm_/10890173 Microfabricated miniature valves and pumps with a polyimide diaphragm.