10027/16960
Yu-Cheng. Lin
Yu-Cheng.
Lin
Microfabricated miniature valves and pumps with a polyimide diaphragm.
University of Illinois at Chicago
2014
Engineering, Electronics and Electrical.
2014-03-18 00:00:00
Thesis
https://indigo.uic.edu/articles/thesis/Microfabricated_miniature_valves_and_pumps_with_a_polyimide_diaphragm_/10890173
Microfabricated miniature valves and pumps with a polyimide diaphragm.