Microfabricated miniature valves and pumps with a polyimide diaphragm. Yu-Cheng. Lin 10027/16960 https://indigo.uic.edu/articles/thesis/Microfabricated_miniature_valves_and_pumps_with_a_polyimide_diaphragm_/10890173 Microfabricated miniature valves and pumps with a polyimide diaphragm. 2014-03-18 00:00:00 Engineering, Electronics and Electrical.