%0 Thesis %A Lin, Yu-Cheng. %D 2014 %T Microfabricated miniature valves and pumps with a polyimide diaphragm. %U https://indigo.uic.edu/articles/thesis/Microfabricated_miniature_valves_and_pumps_with_a_polyimide_diaphragm_/10890173 %K Engineering, Electronics and Electrical. %X Microfabricated miniature valves and pumps with a polyimide diaphragm. %I University of Illinois at Chicago