Fabrication of silicon nanoparticles using atomic layer epitaxy.
Deepthi. Gopireddy
10027/13753
https://indigo.uic.edu/articles/thesis/Fabrication_of_silicon_nanoparticles_using_atomic_layer_epitaxy_/10920632
Fabrication of silicon nanoparticles using atomic layer epitaxy.
2014-03-18 00:00:00
Engineering, Chemical.