Fabrication of silicon nanoparticles using atomic layer epitaxy. Deepthi. Gopireddy 10027/13753 https://indigo.uic.edu/articles/thesis/Fabrication_of_silicon_nanoparticles_using_atomic_layer_epitaxy_/10920632 Fabrication of silicon nanoparticles using atomic layer epitaxy. 2014-03-18 00:00:00 Engineering, Chemical.