University of Illinois Chicago
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Process-property-structure relationship of silicon and silicon-germanium oxynitrides.

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posted on 2025-05-30, 13:42 authored by Anindya. Dasgupta
Process-property-structure relationship of silicon and silicon-germanium oxynitrides.

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Degree Grantor

University of Illinois at Chicago.

Degree Level

  • Doctoral

Language

  • en

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    Keywords

    Engineering, Chemical.

    Licence

    In Copyright

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