University of Illinois at Chicago
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Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool.

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journal contribution
posted on 2016-05-16, 00:00 authored by J Camacho-Bunquin, H Shou, P Aich, DR Beaulieu, H Klotzsch, S Bachman, CL Marshall, A Hock, P Stair
An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10(-3) to 1 bar and 300-1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.


The work at Argonne National Laboratory was supportedby the U.S. Department of Energy, Office of the Basic EnergySciences, Chemical Sciences under Contract No. DE-AC-02-6H11357. High Resolution TEM images were obtained atUIC’s Research Resources Center facility using the JEM-3010(a 300 kV transmission electron microscope with a LaB6electron source).


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This is the copy of an article published in the Review of Scientific Instruments © 2015 American Institute of Physics Publications.


American Institute of Physics



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