posted on 30.10.2015, 00:00by J. Sun Park, L. Cheng, V. Zorba, A. Mehta, J. Cabana, G. Chen
We present a study of the fabrication of thin films from a Li7La3Zr2O12 (LLZO) target using
pulsed laser deposition. The effects of substrate temperatures and impurities on
electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O
were deposited at room temperature and higher temperatures on a variety of substrates.
Deposition above 600 °C resulted in a mixture of cubic and tetragonal phases of LLZO, as
well as a La2Zr2O7 impurity, and resulted in aluminum enrichment at the surface when Al-
containing substrates were used. Films deposited at 600 °C exhibited the highest room
temperature conductivity, 1.61×10-6 S/cm. The chemical stability toward metallic lithium
was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation
state of zirconium remained at +4 following physical contact with heated lithium metal.
This work was supported by the Assistant Secretary for Energy Efficiency and Renewable
Energy, Office of Vehicle Technologies and the Chemical Sciences, Geosciences, and
Biosciences Division, Office of Basic Energy Sciences of the U.S. Department of Energy
under contract no. DE-AC02-05CH11231. A portion of this work was done at Stanford
Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, which is
supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy
Sciences under Contract No. DE-AC02-76SF00515.
This is the author's version of a work that was accepted for publication in Thin Solid Films. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definative version wass subsequently published in Thin Solid Films, 2015. 576: 55-60. DOI:10.1016/j.tsf.2014.11.019.