posted on 2016-08-13, 00:00authored byMT Humayun, R Divan, L Stan, A Gupta, D Rosenmann, L Gundel, PA Solomon, I Paprotny
This paper presents a novel atomic layer deposition (ALD) based ZnO functionalization of surface
pretreated multiwalled carbon nanotubes (MWCNTs) for highly sensitive methane chemoresistive
sensors. The temperature optimization of the ALD process leads to enhanced ZnO nanoparticle
functionalization and improvement in their crystalline quality as shown by energy dispersive x-ray
and Raman spectroscopy. The behavior of ZnO–MWCNT sensors in presence of methane concentrations
down to 2 ppm level has been compared with that of pristine MWCNTs demonstrating that
ZnO functionalization is an essential factor behind the highly sensitive chemoresistive nature of the
ZnO–MWCNT heterostructures. The sensor is currently being tested under a range of conditions
that include potentially interfering gases and changes to relative humidity.
Funding
Supported by the U.S.
Department of Energy, Office of Science, Office of Basic
Energy Sciences, under Contract No. DE-AC02-06CH11357.
College of Engineering, University of Illinois, Chicago, IL, in
part funded the project.