A STUDY OF THE DICING DAMAGE IN SINGLE-CRYSTAL SILICON.

thesis

posted on 2025-05-30, 13:51 authored by JAE-MOOK. KIM

A STUDY OF THE DICING DAMAGE IN SINGLE-CRYSTAL SILICON.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

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Keywords

Engineering, Materials Science.

Licence

Exports