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A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS).

thesis
posted on 2025-05-30, 10:04 authored by Eniko Todorov. Enikov
A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS).

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Degree Grantor

University of Illinois at Chicago.

Degree Level

  • Doctoral

Language

  • en

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    Keywords

    Applied Mechanics.

    Licence

    In Copyright

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