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Chemical vapor deposition of aluminum oxide thin films and interaction of magnesium with an aluminum oxide surface.

thesis
posted on 2014-12-04, 00:00 authored by ZiQi. Zhou
Chemical vapor deposition of aluminum oxide thin films and interaction of magnesium with an aluminum oxide surface.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

  • Doctoral

Language

  • en

Issue date

1994-01-01

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