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Chemical vapor deposition of aluminum oxide thin films and interaction of magnesium with an aluminum oxide surface.

thesis
posted on 04.12.2014 by ZiQi. Zhou
Chemical vapor deposition of aluminum oxide thin films and interaction of magnesium with an aluminum oxide surface.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

Issue date

01/01/1994

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