Fundamental studies on silicon and silicon germanium oxidation by ozone.

thesis

posted on 2025-05-30, 10:12 authored by Zhenjiang. Cui

Fundamental studies on silicon and silicon germanium oxidation by ozone.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

Usage metrics

Categories

No categories selected

Keywords

Engineering, Chemical.

Licence

Exports