Fundamental studies on silicon and silicon germanium oxidation by ozone.

thesis

posted on 2014-03-20, 00:00 authored by Zhenjiang. Cui

Fundamental studies on silicon and silicon germanium oxidation by ozone.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

Issue date

2000-01-01

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https://uic.figshare.com/account/projects/71123/articles/10784129

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Keywords

Engineering, Chemical.

Licence

Exports