University of Illinois at Chicago
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Fundamental studies on silicon and silicon germanium oxidation by ozone.

thesis
posted on 2014-03-20, 00:00 authored by Zhenjiang. Cui
Fundamental studies on silicon and silicon germanium oxidation by ozone.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

  • Doctoral

Language

  • en

Issue date

2000-01-01

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    Keywords

    Engineering, Chemical.

    Licence

    In Copyright

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