Fundamental studies on ultra-thin oxynitrides and nitrides of silicon and silicon-germanium.

thesis

posted on 2025-05-30, 10:20 authored by Sanjit Singh. Dang

Fundamental studies on ultra-thin oxynitrides and nitrides of silicon and silicon-germanium.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

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Keywords

Engineering, Chemical.

Licence

Exports