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Fundamental studies on ultra-thin oxynitrides and nitrides of silicon and silicon-germanium.

thesis
posted on 20.03.2014, 00:00 authored by Sanjit Singh. Dang
Fundamental studies on ultra-thin oxynitrides and nitrides of silicon and silicon-germanium.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

Issue date

01/01/2000

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Categories

Keywords

Engineering, Chemical.

Licence

In Copyright

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