Investigation of tetramethylammonium hydroxide etching selectivity using micro Raman spectroscopy.

thesis

posted on 2014-03-20, 00:00 authored by Sung Bok. Lee

Investigation of tetramethylammonium hydroxide etching selectivity using micro Raman spectroscopy.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

Issue date

1999-01-01

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https://uic.figshare.com/account/projects/71123/articles/10844363

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Keywords

Chemistry, Physical.

Licence

Exports