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Investigation of tetramethylammonium hydroxide etching selectivity using micro Raman spectroscopy.
thesis
posted on 2014-03-20, 00:00 authored by Sung Bok. LeeInvestigation of tetramethylammonium hydroxide etching selectivity using micro Raman spectroscopy.
History
Degree Grantor
University of Illinois at Chicago.Degree Level
- Doctoral
Language
- en