Structural and interfacial studies of atomic layer deposited high-k materials on silicon.

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posted on 2014-03-18, 00:00 authored by Ramarajesh. Katamreddy

Structural and interfacial studies of atomic layer deposited high-k materials on silicon.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

Issue date

2007-01-01

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https://uic.figshare.com/account/projects/71123/articles/10830983

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Keywords

Engineering, Chemical.

Licence

Exports