Ultrathin silicon dioxide and aluminum oxide on silicon: Fundamental studies of the interface.

thesis

posted on 2025-05-30, 12:31 authored by Abhijit. Roy Chowdhuri

Ultrathin silicon dioxide and aluminum oxide on silicon: Fundamental studies of the interface.

History

Degree Grantor

University of Illinois at Chicago.

Degree Level

Doctoral

Language

en

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Keywords

Engineering, Chemical.

Licence

Exports