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    • Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges 

      Punchihewa, Kasun Gardiye; Zaker, Evan; Kuljic, Rade; Banerjee, Koushik; Dankovic, Tatjana; Feinerman, Alan; Busta, Heinz (MDPI, 2012-06)
      Abstract: Using bulk micromachining, meander-shaped resistor elements consisting of 20 nm Cr and 200 nm Au were fabricated on 1 µm thick silicon nitride membranes, bridges, and cantilevers. The resistance change as a ...