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    Investigating Compositional Effects of ALD Ternary Dielectric Ti-Al-O on MISH capacitor structure for Gate Insulation of InAlN/GaN and AlGaN/GaN 

    Colon, Albert; Ralu Divan, Liliana Stan; Shi, Junxia (American Institute of Physics Inc., 2016-11-01)
    Gate insulation/surface passivation in AlGaN/GaN and InAlN/GaN heterojunction fieldeffect transistors (HFETs) is a major concern for passivation of surface traps and reduction of gate leakage current. However, finding ...

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    Colon, Albert (1)
    Ralu Divan, Liliana Stan (1)Shi, Junxia (1)SubjectMISH (1)
    TLM (1)
    ... View MoreDate Issued2016 (1)

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